Chemical Mechanical Planarization Of Semiconductor Materials
Download and Read Chemical Mechanical Planarization Of Semiconductor Materials full books in PDF, ePUB, and Kindle. Read online free Chemical Mechanical Planarization Of Semiconductor Materials ebook anywhere anytime directly on your device. We cannot guarantee that every ebooks is available!
Chemical-Mechanical Planarization of Semiconductor Materials
Author | : M.R. Oliver |
Publisher | : Springer Science & Business Media |
Total Pages | : 444 |
Release | : 2004-01-26 |
Genre | : Technology & Engineering |
ISBN | : 9783540431817 |
Download Chemical-Mechanical Planarization of Semiconductor Materials Book in PDF, Epub and Kindle
This book contains a comprehensive review of CMP (Chemical-Mechanical Planarization) technology, one of the most exciting areas in the field of semiconductor technology. It contains detailed discussions of all aspects of the technology, for both dielectrics and metals. The state of polishing models and their relation to experimental results are covered. Polishing tools and consumables are also covered. The leading edge issues of damascene and new dielectrics as well as slurryless technology are discussed.
Chemical-Mechanical Planarization of Semiconductor Materials Related Books
Pages: 444
Pages: 337
Pages: 650
Pages: 432
Pages: 444