Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators

Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators
Author: Rajan Sharad Naik
Publisher:
Total Pages: 14
Release: 1998
Genre:
ISBN:
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Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators
Language: en
Pages: 14

Characterization of the Piezoelectric Response of Aluminum Nitride Grown by DC Magnetron Sputtering for Applications in Thin-film Resonators

Authors: Rajan Sharad Naik
Categories:
Type: BOOK - Published: 1998 - Publisher:

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DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application
Language: en
Pages: 61

DC Magnetron Reactive Sputtering of Low Stress AlN Piezoelectric Thin Films for MEMS Application

Authors: Peter Y. Hsieh
Categories:
Type: BOOK - Published: 1999-10-01 - Publisher:

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Microelectromechanical systems (MEMS) often incorporate piezoelectric thin films to actuate and detect motion of mechanical structures. Aluminum nitride is adva
Materials for Mechanical and Optical Microsystems: Volume 444
Language: en
Pages: 264

Materials for Mechanical and Optical Microsystems: Volume 444

Authors: Michael L. Reed
Categories: Mathematics
Type: BOOK - Published: 1997-03-30 - Publisher:

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A selection of 33 reviewed papers explore the materials aspects of microsystems, especially those involving mechanical, optical, and thermal components. The top
Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices
Language: en
Pages: 124

Aluminum Nitride Thin Films - Deposition for Fabrication, Characterization and Fabrication of Surface Acoustic Wave Devices

Authors: Charlee Fansler
Categories: Technology & Engineering
Type: BOOK - Published: 2008 - Publisher:

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Aluminum Nitride (AlN) thin films can be used for many device applications; for example, Surface Acoustic Wave (SAW) devices, microelectromechanical systems (ME
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering
Language: en
Pages: 73

Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

Authors: Tuomas Hänninen
Categories:
Type: BOOK - Published: 2018-02-13 - Publisher: Linköping University Electronic Press

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Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them