Analytical And Diagnostic Techniques For Semiconductor Materials Devices And Processes 7
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Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes 7
| Author | : Dieter K. Schroder |
| Publisher | : The Electrochemical Society |
| Total Pages | : 406 |
| Release | : 2007 |
| Genre | : Semiconductors |
| ISBN | : 1566775698 |
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Diagnostic characterization techniques for semiconductor materials, devices and device processing are addressed at this symposium. It will cover new techniques as well as advances in routine analytical technology applied to semiconductor process development and manufacture. The hardcover edition includes a CD-ROM of ECS Transactions, Volume 10, Issue 1, Analytical Techniques for Semiconductor Materials and Process Characterization 5 (ALTECH 2007). The PDF edition also includes the ALTECH 2007 papers.
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