Aluminum Nitride Thin Films For Mems Resonators
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Aluminum Nitride Thin Films for MEMS Resonators
| Author | : Vanni Lughi |
| Publisher | : |
| Total Pages | : 530 |
| Release | : 2006 |
| Genre | : |
| ISBN | : 9780542681318 |
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High quality aluminum nitride films, meeting all the requirements for the fabrication of the resonators, were deposited at low temperature (
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