Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications

Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications
Author: Masood Hasheminiasari
Publisher:
Total Pages: 168
Release: 2013
Genre: Aluminum nitride
ISBN:
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Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications
Language: en
Pages: 168

Aluminum Nitride Piezoelectric Thin Films Reactively Deposited in Closed Field Unbalanced Magnetron Sputtering for Elevated Temperature 'smart' Tribological Applications

Authors: Masood Hasheminiasari
Categories: Aluminum nitride
Type: BOOK - Published: 2013 - Publisher:

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Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films
Language: en
Pages:

Pulsed DC Reactive Magnetron Sputtering of Aluminum Nitride Thin Films

Authors:
Categories:
Type: BOOK - Published: 2003 - Publisher:

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Aluminum nitride thin films have been deposited by pulsed DC reactive magnetron sputtering. The pulsed DC power provides arc-free deposition of insulating films
Advanced Strategies in Thin Film Engineering by Magnetron Sputtering
Language: en
Pages: 148

Advanced Strategies in Thin Film Engineering by Magnetron Sputtering

Authors: Alberto Palmero
Categories: Science
Type: BOOK - Published: 2020-12-10 - Publisher: MDPI

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Recent years have witnessed the flourishing of numerous novel strategies based on the magnetron sputtering technique aimed at the advanced engineering of thin f
Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering
Language: en
Pages: 73

Silicon Nitride Based Coatings Grown by Reactive Magnetron Sputtering

Authors: Tuomas Hänninen
Categories:
Type: BOOK - Published: 2018-02-13 - Publisher: Linköping University Electronic Press

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Silicon nitride and silicon nitride-based ceramics have several favorable material properties, such as high hardness and good wear resistance, which makes them
Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform]
Language: en
Pages: 192

Characterization of Piezoelectric AIN Thin Films Deposited on Silicon by RF Reactive Magnetron Sputtering at Low Temperature for Acoustic Wave Devices [microform]

Authors: Akhtar Mirfazli
Categories: Acoustic surface wave devices
Type: BOOK - Published: 2004 - Publisher: National Library of Canada = Bibliothèque nationale du Canada

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