Advanced Short-time Thermal Processing for Si-based CMOS Devices

Advanced Short-time Thermal Processing for Si-based CMOS Devices
Author: Fred Roozeboom
Publisher: The Electrochemical Society
Total Pages: 488
Release: 2003
Genre: Computers
ISBN: 9781566773966


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Advanced Short-time Thermal Processing for Si-based CMOS Devices
Language: en
Pages: 488
Authors: Fred Roozeboom
Categories: Computers
Type: BOOK - Published: 2003 - Publisher: The Electrochemical Society

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Advanced Short-time Thermal Processing for Si-based CMOS Devices 2
Language: en
Pages: 444
Authors: Mehmet C. Öztürk
Categories: Technology & Engineering
Type: BOOK - Published: 2004 - Publisher: The Electrochemical Society

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Advanced Gate Stack, Source/drain, and Channel Engineering for Si-based CMOS 2
Language: en
Pages: 472
Authors: Fred Roozeboom
Categories: Gate array circuits
Type: BOOK - Published: 2006 - Publisher: The Electrochemical Society

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These proceedings describe processing, materials, and equipment for CMOS front-end integration including gate stack, source/drain and channel engineering. Topic
Handbook of Semiconductor Manufacturing Technology
Language: en
Pages: 1720
Authors: Yoshio Nishi
Categories: Technology & Engineering
Type: BOOK - Published: 2017-12-19 - Publisher: CRC Press

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Retaining the comprehensive and in-depth approach that cemented the bestselling first edition's place as a standard reference in the field, the Handbook of Semi
Advanced Gate Stack, Source/drain and Channel Engineering for Si-based CMOS
Language: en
Pages: 658
Authors:
Categories: Technology & Engineering
Type: BOOK - Published: 2005 - Publisher:

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